TOOL INFORMATION
The
SMIF tool set is installed and
fully functioning as part of the
IDT offering. The 200mm tools
are currently used for 0.8μm
through 0.13μm. This highly
capable line is currently
running complex process between
13 to 30 mask layers.
• DNS tracks and ASM
steppers/scanners are integrated.
• Highly automated and organized
by process design with WorkStream software.
• O verhead Aerotrak transport
system with full automation to tool load port.